8 St. Kl. Ohridski blvd., 1797 Sofia, Bulgaria +359 2 965 3085

Academic Disciplines - Materials Science for Microelectronics

Materials Science for Microelectronics

Assoc. Prof. Ph.D. Mariya Aleksandrova, email: m_aleksandrova@tu-sofia.bg

The student will gain knowledge of the properties and application of the newest materials in the
field of microelectronics. At the end of the course the students will know the latest products in the
field of microsystems and microcircuits; will be familiar with the modern methods of qualitative
and quantitative analysis of materials; can be categorized and characterized the semiconductor,
dielectric and conductive materials in bulk and thin film form; knows about the methods for
measuring the main electrical, optical, mechanical properties of the films and devices.

Some of the major topics studied are as follows: main methods of obtaining pure and highly pure
substances used for microelectronic devices; methods for fabrication of monocrystalline and
polycrystalline materials; semiconductor and ceramic planar substrates; thin dielectric, resistive and
conductive materials; piezoelectric, thermoelectric, photovoltaic, magnetic, superconducting and
electroluminescent films; packaging materials, nanomaterials – all of them related to new
applications in the microelectronics and microsystems.


1. Aleksandrova, Dobrikov, Videkov, " Material Science for
Microelectronics”, TU-Sofia Publishing House, 2015.
2. Rassovska M.M., V.H. Videkov et.al, “Handbook of laboratory exercises of Material Science for
Microelectronics”, TU-Sofia Publishing House, 2003.